Silicon-Based 3D Microfluidics for Parallelization of Droplet Generation

Both the diversity and complexity of microfluidic systems have experienced a tremendous progress over last decades, enabled by new materials, novel device concepts innovative fabrication routes. In particular subfield high-throughput screening, used for biochemical, genetic pharmacological samples, has extensively emerged from developments in droplet microfluidics. More recently, 3D architectures either stacking layers PDMS or direct 3D-printing gained enormous attention applications chemical synthesis biomedical assays. While first devices were based on silicon glass structures, those materials not yet been significantly expanded towards despite their high compatibility, mechanical strength mass-production potential. our work, we present generic route implementation vertical vias redistribution layer to create glass–silicon–glass structures. It is build different droplet-generating with several flow-focusing junctions parallel, all fed single source. We study effect having these parallel varying flow conditions both continuous dispersed phases. demonstrate that concept enables an upscaling production rate increasing number generators per without sacrificing monodispersity droplets.